Smart double-cut via insertion flow with dynamic design-rules compliance for fast new technology adoption

Ahmad Abdulghany; Rami Fathy; Luigi Capodieci; Piyush Pathak; Sriram Madhavan; Shobhit Malik

doi:10.1117/12.915796

14 March 2012 Smart double-cut via insertion flow with dynamic design-rules compliance for fast new technology adoption

Ahmad Abdulghany, Rami Fathy, Luigi Capodieci, Piyush Pathak, Sriram Madhavan, Shobhit Malik

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 83270C (2012) https://doi.org/10.1117/12.915796
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

As IC technologies shrink and via defects remain the same size, the probability of via defects increases. Redundant via insertion is an effective method to reduce yield loss related to via failures, but a large number of extremely complex design rules make efficient automatic via insertion difficult. This paper introduces an automatic redundant via insertion flow which is capable of adopting new technologies and complex design rules extremely quickly. Runtime and efficiency are optimized through a smart insertion scheduling technique. Our experiments show that it efficiently improves redundant via percentage, making designs more robust against via defects.

Citation Download Citation

Ahmad Abdulghany, Rami Fathy, Luigi Capodieci, Piyush Pathak, Sriram Madhavan, and Shobhit Malik "Smart double-cut via insertion flow with dynamic design-rules compliance for fast new technology adoption", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270C (14 March 2012); https://doi.org/10.1117/12.915796

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