Recent advances in design and fabrication of on-chip micro-supercapacitors

Majid Beidaghi; Chunlei Wang

doi:10.1117/12.920819

24 May 2012 Recent advances in design and fabrication of on-chip micro-supercapacitors

Majid Beidaghi, Chunlei Wang

Proceedings Volume 8377, Energy Harvesting and Storage: Materials, Devices, and Applications III; 837708 (2012) https://doi.org/10.1117/12.920819
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

Recent development in miniaturized electronic devices has increased the demand for power sources that are sufficiently compact and can potentially be integrated on a chip with other electronic components. Miniaturized electrochemical capacitors (EC) or micro-supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. Recently, we have developed several types of micro-supercapacitors with different structural designs and active materials. Carbon-Microelectromechanical Systems (C-MEMS) with three dimensional (3D) interdigital structures are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of pseudo-capacitive materials. More recently, we have also developed microsupercapacitor based on hybrid graphene and carbon nanotube interdigital structures. In this paper, the recent advances in design and fabrication of on-chip micro-supercapacitors are reviewed.

Citation Download Citation

Majid Beidaghi and Chunlei Wang "Recent advances in design and fabrication of on-chip micro-supercapacitors", Proc. SPIE 8377, Energy Harvesting and Storage: Materials, Devices, and Applications III, 837708 (24 May 2012); https://doi.org/10.1117/12.920819

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