New unimorph deformable mirror for laser beam shaping

Jianqiang Ma; Ying Liu; Xiaohui Xu; Baoqing Li; Jiaru Chu

doi:10.1117/12.973683

15 October 2012 New unimorph deformable mirror for laser beam shaping

Jianqiang Ma, Ying Liu, Xiaohui Xu, Baoqing Li, Jiaru Chu

Proceedings Volume 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy; 841909 (2012) https://doi.org/10.1117/12.973683
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Unimorph DMs are attractive for laser beam shaping due to their advantages of simplicity, compact, low cost and large stroke. This paper reports a novel unimorph deformable mirror used for laser beam shaping. The developed DM consists of both an inner actuator array and an outer ring actuator. The inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. A laser beam shaping experimental setup with a He-Ne laser was constructed. The correction capability of the DM is demonstrated by simulation and experiment.

Citation Download Citation

Jianqiang Ma, Ying Liu, Xiaohui Xu, Baoqing Li, and Jiaru Chu "New unimorph deformable mirror for laser beam shaping", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 841909 (15 October 2012); https://doi.org/10.1117/12.973683

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