Paper
8 May 2012 Single-shot-capable fast multichannel Fourier transform interferometer based on a microfabricated 3D multimirror array
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Abstract
We present a Fourier transform interferometer that is capable to record single short pulses and fast continuous transient spectra. This is achieved by spatially parallel instead of time serial processing by means of a micro/nanomanufactured multimirror array and a pixellated detector camera. The multimirror array is produced in excellent optical quality from poly(methyl methacrylate) by means of deep X-ray gray level lithography including multiple moving masks followed by sputter deposition of the gold reflecting surfaces. The crucial components such as the multimirror array and the pixellated camera are part of a straightforward optical system similar to a Czerny-Turner mount. Results demonstrate single shot measurements down to 320 μs, only limited by the camera shutter and the infrared source, and the time evolution of the absorption spectrum of an evaporating acetone layer that shows spectral changes during the first few seconds. While the spectral range of the multichannel Fourier transform interferometer (MC FTIR) as reported extends from near to mid infrared, multimirror arrays can be produced for spectra from visible to far infrared. Thus, the potential performance depends mostly on availability of detectors. The minimum pulse duration is determined by that photon number in the pulse which yields a sufficient signal to noise ratio, whereas the maximum acquisition rate of continuous transients is given by the frame rate of the detector.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. O. Moser, S. P. Heussler, and S. M. P. Kalaiselvi "Single-shot-capable fast multichannel Fourier transform interferometer based on a microfabricated 3D multimirror array", Proc. SPIE 8428, Micro-Optics 2012, 84280Y (8 May 2012); https://doi.org/10.1117/12.921992
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Cited by 2 patents.
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KEYWORDS
Mirrors

FT-IR spectroscopy

Interferometers

Sensors

Fourier transforms

Etching

X-rays

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