TES arrays for the short wavelength band of the SAFARI instrument on SPICA

P. Khosropanah; R. Hijmering; M. Ridder; J. R. Gao; D. Morozov; P. D. Mauskopf; N. Trappe; C. O'Sullivan; A. Murphy; D. Griffin; D. Goldie; D. Glowacka; S. Withington; B. D. Jackson; M. D. Audley; G. de Lange

doi:10.1117/12.925334

24 September 2012 TES arrays for the short wavelength band of the SAFARI instrument on SPICA

P. Khosropanah, R. Hijmering, M. Ridder, J. R. Gao, D. Morozov, P. D. Mauskopf, N. Trappe, C. O'Sullivan, A. Murphy, D. Griffin, D. Goldie, D. Glowacka, S. Withington, B. D. Jackson, M. D. Audley, G. de Lange

Author Affiliations +

Proceedings Volume 8452, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VI; 845209 (2012) https://doi.org/10.1117/12.925334
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

SPICA is an infra-red (IR) telescope with a cryogenically cooled mirror (~5K) with three instruments on board, one of which is SAFARI that is an imaging Fourier Transform Spectrometer (FTS) with three bands covering the wavelength of 34-210 μm. We develop transition edge sensors (TES) array for short wavelength band (34-60 μm) of SAFARI. These are based on superconducting Ti/Au bilayer as TES bolometers with a T_c of about 105 mK and thin Ta film as IR absorbers on suspended silicon nitride (SiN) membranes. These membranes are supported by long and narrow SiN legs that act as weak thermal links between the TES and the bath. Previously an electrical noise equivalent power (NEP) of 4×10^-19 W/√Hz was achieved for a single pixel of such detectors. As an intermediate step toward a full-size SAFARI array (43×43), we fabricated several 8×9 detector arrays. Here we describe the design and the outcome of the dark and optical tests of several of these devices. We achieved high yield (<93%) and high uniformity in terms of critical temperature (<5%) and normal resistance (7%) across the arrays. The measured dark NEPs are as low as 5×10^-19 W/√Hz with a response time of about 1.4 ms at preferred operating bias point. The optical coupling is implemented using pyramidal horns array on the top and hemispherical cavity behind the chip that gives a measured total optical coupling efficiency of 30±7%.

Citation Download Citation

P. Khosropanah, R. Hijmering, M. Ridder, J. R. Gao, D. Morozov, P. D. Mauskopf, N. Trappe, C. O'Sullivan, A. Murphy, D. Griffin, D. Goldie, D. Glowacka, S. Withington, B. D. Jackson, M. D. Audley, and G. de Lange "TES arrays for the short wavelength band of the SAFARI instrument on SPICA", Proc. SPIE 8452, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VI, 845209 (24 September 2012); https://doi.org/10.1117/12.925334

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available