Graphene Raman imaging and spectroscopy processing: characterization of graphene growth

Matias G. Babenco; Li Tao; Deji Akinwande

doi:10.1117/12.928711

25 October 2012 Graphene Raman imaging and spectroscopy processing: characterization of graphene growth

Matias G. Babenco, Li Tao, Deji Akinwande

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 84660O (2012) https://doi.org/10.1117/12.928711
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

Raman spectroscopy is a widely used metric to characterize the quality of graphene films prepared by exfoliation or synthesis. As research on graphene advances and graphene is grown over large scales, mapping of growth surface and analysis of Raman spectroscopy is necessary to promote metrology, quality quantification, fundamental research and advanced commercial applications. We present a novel data processing program for analysis of Raman spectroscopy, Graphene Raman Imaging and Spectroscopy Processing (GRISP). GRISP is capable of providing accurate statistical data on key features of the Raman spectrum of graphene over large areas, namely 2D, G and D peak intensity and intensity ratios between 2D to G (I_2D/I_G) and D to G (I_D/I_G) as well as Full Width at Half-Maximum of the 2D peak (FWHM_2D). GRISP can also map processed data to form mapping images and histogram from which growth quality can be easily visualized and quantified. GRISP takes binary or text formatted raw data and can be directly accessed from nanoHUB platform, thus is universal and independent of the apparatus for Raman spectroscopy.

Citation Download Citation

Matias G. Babenco, Li Tao, and Deji Akinwande "Graphene Raman imaging and spectroscopy processing: characterization of graphene growth", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660O (25 October 2012); https://doi.org/10.1117/12.928711

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