Contact metal effects in indium phosphide nanowire transistor

Jin-woo Han; Andrew J. Lohn; Meyya Meyyappan; Nobuhiko P. Kobayashi

doi:10.1117/12.930530

11 October 2012 Contact metal effects in indium phosphide nanowire transistor

Jin-woo Han, Andrew J. Lohn, Meyya Meyyappan, Nobuhiko P. Kobayashi

Proceedings Volume 8467, Nanoepitaxy: Materials and Devices IV; 84670Z (2012) https://doi.org/10.1117/12.930530
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

We have investigated electrical properties of indium phosphide nanowire field effect transistors with four different types of metal electrodes (Cr, Ti, Au, and Pt). The nanowires with a width of 50 nm were undoped and grown by metal-organic chemical vapor deposition. Among the four types of metal electrodes, Cr/InP and Ti/InP showed ambipolar conduction, while Pt/InP and Au/InP exhibited p-type conduction. Extracted Schottky barrier heights suggest that barrier heights do not vary linearly with respect to the metal workfunction. Although the Pt/InP features the smallest barrier height, the Au/InP showed the highest drain current at a given gate bias.

Citation Download Citation

Jin-woo Han, Andrew J. Lohn, Meyya Meyyappan, and Nobuhiko P. Kobayashi "Contact metal effects in indium phosphide nanowire transistor", Proc. SPIE 8467, Nanoepitaxy: Materials and Devices IV, 84670Z (11 October 2012); https://doi.org/10.1117/12.930530

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