Micromachined reference samples for particle counting

David P. Taylor; William W. Hansen; Lee Steffeney; C.-T. Chu

doi:10.1117/12.940174

15 October 2012 Micromachined reference samples for particle counting

David P. Taylor, William W. Hansen, Lee Steffeney, C.-T. Chu

Proceedings Volume 8492, Optical System Contamination: Effects, Measurements, and Control 2012; 84920J (2012) https://doi.org/10.1117/12.940174
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Three micromachined reference sample prototypes for particle counting have been fabricated by using dark ceramic spots in a transparent glass wafer to simulate particles on a surface. The direct write approach permits the spots to be positioned at random locations within an indicated area of the sample with sizes and numbers that are consistent with a distribution of particles. The goal of this work is to provide a path to creating a set of particle counting and sizing samples that can be used to establish the accuracy and precision of different measurements.

Citation Download Citation

David P. Taylor, William W. Hansen, Lee Steffeney, and C.-T. Chu "Micromachined reference samples for particle counting", Proc. SPIE 8492, Optical System Contamination: Effects, Measurements, and Control 2012, 84920J (15 October 2012); https://doi.org/10.1117/12.940174

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