Comparison of the area structure function to alternate approaches for optical surface characterization

Liangyu He; Angela Davies; Chris J. Evans

doi:10.1117/12.929166

13 September 2012 Comparison of the area structure function to alternate approaches for optical surface characterization

Liangyu He, Angela Davies, Chris J. Evans

Author Affiliations +

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 84930C (2012) https://doi.org/10.1117/12.929166
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

The structure function (SF) represents the average height difference squared as a function of separation. The linear SF has been used in astronomy and captures data of all spatial frequencies. However, it does not capture anisotropy on the surface. The one-quadrant area SF has been introduced to represent surface roughness information, but it is inadequate when surfaces are rotationally varying, as is frequently the case for optical surfaces. The recently introduced twoquadrant representation of the area SF can be calculated for any aperture shape, for all spatial content and isotropies. This paper describes the physical interpretation of the two-quadrant area SF and the comparison to area power spectral density (PSD) and area autocorrelation function (ACF) for a range of optical surfaces.

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Liangyu He, Angela Davies, and Chris J. Evans "Comparison of the area structure function to alternate approaches for optical surface characterization", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930C (13 September 2012); https://doi.org/10.1117/12.929166

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