Calibrating the sag due to gravity of horizontal interferometer reference flats

Jan Burke; Ulf Griesmann

doi:10.1117/12.929968

13 September 2012 Calibrating the sag due to gravity of horizontal interferometer reference flats

Jan Burke, Ulf Griesmann

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 84930F (2012) https://doi.org/10.1117/12.929968
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We describe a method for measuring the deflection due to gravity (sag) of horizontally mounted reference flats of phase shifting interferometers. The planarity of a test flat can be measured sag-free while supporting it iso-statically on a suitable visco-elastic polymer foam. A sag map is obtained when the sag-free flatness error is subtracted from the flatness error of the same flat held at its edge.

Citation Download Citation

Jan Burke and Ulf Griesmann "Calibrating the sag due to gravity of horizontal interferometer reference flats", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930F (13 September 2012); https://doi.org/10.1117/12.929968

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