Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces

Osami Sasaki; Takahiro Kurashige; Samuel Choi; Takamasa Suzuki

doi:10.1117/12.929137

13 September 2012 Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces

Osami Sasaki, Takahiro Kurashige, Samuel Choi, Takamasa Suzuki

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 84930M (2012) https://doi.org/10.1117/12.929137
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Zb due to the SWS besides a conventional phase α. Propagation time and wavefront of the light wave diffusely reflected from a metal surface can be detected from the amplitude Zb and the phase α, respectively. A concave shape with the depth of about a few hundreds microns is measured with an error less than a few microns by using only the amplitude Zb of the detected interference signal.

Citation Download Citation

Osami Sasaki, Takahiro Kurashige, Samuel Choi, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930M (13 September 2012); https://doi.org/10.1117/12.929137

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