Tuning of optical properties by atomic layer deposition

Y. Qin; R. Vogelgesang; M. Eßlinger; M. Knez

doi:10.1117/12.2003613

5 March 2013 Tuning of optical properties by atomic layer deposition

Y. Qin, R. Vogelgesang, M. Eßlinger, M. Knez

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86130B (2013) https://doi.org/10.1117/12.2003613
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

A combination of deposition strategies was applied in order to synthesize Au nanoparticle chains embedded in helical Al₂O₃ nanotubes (“nanopeapods”). Carbon nanocoils were grown by chemical vapour deposition and coated with Au by sputtering with a subsequent Al₂O₃ coating by atomic layer deposition. Rayleigh instabilities were made use of in order to fragment the Au coating into nanoparticles with a sharp size distribution. The pitch of the nanocoils arising from three-dimensional periodical topography of the carbon nanocoil templates induced a regular spacing between the nanoparticles. The nanoparticle chains show a strong plasmonic resonance behaviour visible as clear polarization contrast at red wavelengths, which is absent in the blue upon excitation with a confocal laser scanning microscope. The fabricated nanopeapods are suggested promising candidates for highly efficient, ultrathin waveguides.

Citation Download Citation

Y. Qin, R. Vogelgesang, M. Eßlinger, and M. Knez "Tuning of optical properties by atomic layer deposition", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130B (5 March 2013); https://doi.org/10.1117/12.2003613

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