On the origin of strain relaxation in epitaxial CdZnO layers

A. Redondo-Cubero; J. Rodrigues; M. Brandt; P. Schäfer; F. Henneberger; M. R. Correia; T. Monteiro; E. Alves; K. Lorenz

doi:10.1117/12.2002969

18 March 2013 On the origin of strain relaxation in epitaxial CdZnO layers

A. Redondo-Cubero, J. Rodrigues, M. Brandt, P. Schäfer, F. Henneberger, M. R. Correia, T. Monteiro, E. Alves, K. Lorenz

Proceedings Volume 8626, Oxide-based Materials and Devices IV; 86260N (2013) https://doi.org/10.1117/12.2002969
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

The origin of a double peak, detected by X-ray diffraction (XRD), in a wurtzite Cd_xZn_1-xO (x=0.17) epilayer, is investigated using Rutherford backscattering spectrometry in channeling geometry (RBS/C). In-depth compositional characterization by RBS/C demonstrates that strain relaxation does not take place via compositional phase separation and does not cause any compositional pulling effects. On the contrary, RBS/C angular scans demonstrate that relaxation is a consequence of progressive structural changes during the heteroepitaxial growth of the film on MgZnO, likely due to the large distortion of the lattice induced by the high Cd content.

Citation Download Citation

A. Redondo-Cubero, J. Rodrigues, M. Brandt, P. Schäfer, F. Henneberger, M. R. Correia, T. Monteiro, E. Alves, and K. Lorenz "On the origin of strain relaxation in epitaxial CdZnO layers", Proc. SPIE 8626, Oxide-based Materials and Devices IV, 86260N (18 March 2013); https://doi.org/10.1117/12.2002969

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