Introduction of the moth-eye patterned sapphire substrate technology for cost-effective high-performance LEDs

K. Naniwae; M. Mori; T. Kondo; A. Suzuki; T. Kitano; S. Kamiyama; M. Iwaya; T. Takeuchi; I. Akasaki

doi:10.1117/12.2002755

4 March 2013 Introduction of the moth-eye patterned sapphire substrate technology for cost-effective high-performance LEDs

K. Naniwae, M. Mori, T. Kondo, A. Suzuki, T. Kitano, S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki

Author Affiliations +

Proceedings Volume 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII; 86410G (2013) https://doi.org/10.1117/12.2002755
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

The improvement of the performance and the reduction of the cost for LEDs using the moth-eye patterned sapphire substrate (MPSS) were investigated. TEM and CL observation results clearly show that the MPSS can provide a thinner GaN template of equal or higher quality than the micron scale patterned sapphire substrate (PSS) since the MPSS only has a submicron scale structure. A 3-μm-thick high quality GaN template on the MPSS with a dislocation density of 1.9×10⁸ cm^-2 has been demonstrated. The LEDs on MPSS with a 600 nm pitch show the highest light output among the evaluated LEDs on various types of substrates as it is 1.52 times higher than that on flat sapphire substrate (FSS) and 1.18 times higher than that on PSS. The pitch dependence of the light output improvement is in excellent agreement with that of the transmittance at GaN/sapphire interface simulated by the rigorous coupled wave analysis. As a result of comparisons for the GaN templates and LEDs on MPSS, PSS and FSS, it can be concluded that MPSS provides the most cost effective solution for high performance LED.

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K. Naniwae, M. Mori, T. Kondo, A. Suzuki, T. Kitano, S. Kamiyama, M. Iwaya, T. Takeuchi, and I. Akasaki "Introduction of the moth-eye patterned sapphire substrate technology for cost-effective high-performance LEDs", Proc. SPIE 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII, 86410G (4 March 2013); https://doi.org/10.1117/12.2002755

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