Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse

Anas Fauzi; Sung-Jin Kim; Jong-Rae Jung; Seok-Hee Jeon; Nam Kim

doi:10.1117/12.2003503

1 March 2013 Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse

Anas Fauzi, Sung-Jin Kim, Jong-Rae Jung, Seok-Hee Jeon, Nam Kim

Proceedings Volume 8644, Practical Holography XXVII: Materials and Applications; 864404 (2013) https://doi.org/10.1117/12.2003503
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Holographic three dimensional (3D) parallel lithography using femtosecond laser pulse were demonstrated in this paper. A computer generated hologram (CGH) that calculated using kinoform algorithm with optimal rotation angle (ORA) method were used in order to increase the uniformity of the diffraction peaks so that the resolution of the 3D image also improved. The use of femtosecond pulse duration of a Ti:sapphire laser improved the holograms resolution due to larger peak powers that generate larger photonics concentrations at the beam focus and improve single-shot processing. A digital instrument nanoscope was used to verify the result and scanning electron microscopy (SEM) will be used to observe the detail result.

Citation Download Citation

Anas Fauzi, Sung-Jin Kim, Jong-Rae Jung, Seok-Hee Jeon, and Nam Kim "Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulse", Proc. SPIE 8644, Practical Holography XXVII: Materials and Applications, 864404 (1 March 2013); https://doi.org/10.1117/12.2003503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Computer generated holography

Silica

Holograms

Femtosecond phenomena

Holography

Lithography

3D image processing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years