Pattern matching for identifying and resolving non-decomposition-friendly designs for double patterning technology (DPT)

Lynn T. -N. Wang; Vito Dai; Luigi Capodieci

doi:10.1117/12.2011690

29 March 2013 Pattern matching for identifying and resolving non-decomposition-friendly designs for double patterning technology (DPT)

Lynn T. -N. Wang, Vito Dai, Luigi Capodieci

Author Affiliations +

Proceedings Volume 8684, Design for Manufacturability through Design-Process Integration VII; 868409 (2013) https://doi.org/10.1117/12.2011690
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

A pattern matching methodology that identifies non-decomposition-friendly designs and provides localized guidance for layout-fixing is presented for double patterning lithography. This methodology uses a library of patterns in which each pattern has been pre-characterized as impossible-to-decompose and annotated with a design rule for guiding the layout fixes. A pattern matching engine identifies these problematic patterns in design, which allows the layout designers to anticipate and prevent decomposition errors, prior to layout decomposition. The methodology has been demonstrated on a 180 um² layout migrated from the previous 28nm technology node for the metal 1 layer. Using a small library of just 18 patterns, the pattern matching engine identified 119 out of 400 decomposition errors, which constituted coverage of 29.8%.

Citation Download Citation

Lynn T. -N. Wang, Vito Dai, and Luigi Capodieci "Pattern matching for identifying and resolving non-decomposition-friendly designs for double patterning technology (DPT)", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 868409 (29 March 2013); https://doi.org/10.1117/12.2011690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE