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30 May 2013 Front Matter: Volume 8763
Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 876301 (2013) https://doi.org/10.1117/12.2029711
Event: SPIE Microtechnologies, 2013, Grenoble, France
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8673, including the Title Page, Copyright Information, Table of Contents, and the Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 8763", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876301 (30 May 2013); https://doi.org/10.1117/12.2029711
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KEYWORDS
Sensors
Microelectromechanical systems
Magnetic sensors
System integration
Silver
Actuators
Microfluidics
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