Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations

Ali B. Alamin Dow; Achim Bittner; Ulrich Schmid; Nazir P. Kherani

doi:10.1117/12.2017814

17 May 2013 Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations

Ali B. Alamin Dow, Achim Bittner, Ulrich Schmid, Nazir P. Kherani

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87631S (2013) https://doi.org/10.1117/12.2017814
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

This research work presents the design, fabrication and characterization of micromachined piezoelectric energy harvester stimulated by ambient random vibrations utilizing AlN as a piezoelectric material. The device design consists of a silicon cantilever beam on which AlN is sandwiched between two electrodes and a silicon seismic mass at the end of the cantilever beam. The generated electric power of the devices was experimentally measured at various acceleration levels. A maximum power of 34 μW was obtained at an acceleration value of 2g for the device which measures 5.6 x 5.6 mm². Various unpackaged devices were tested and assessed in terms of the generated power and resonant frequency at various acceleration values.

Citation Download Citation

Ali B. Alamin Dow, Achim Bittner, Ulrich Schmid, and Nazir P. Kherani "Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87631S (17 May 2013); https://doi.org/10.1117/12.2017814

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available