Simulation and design optimization of transparent heaters for spectroscopic micro cells

Henning Völlm; Jonathan Herrmann; Reinhard Maier; Dara Feili; Volker Häublein; Heiner Ryssel; Helmut Seidel

doi:10.1117/12.2017166

17 May 2013 Simulation and design optimization of transparent heaters for spectroscopic micro cells

Henning Völlm, Jonathan Herrmann, Reinhard Maier, Dara Feili, Volker Häublein, Heiner Ryssel, Helmut Seidel

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87632C (2013) https://doi.org/10.1117/12.2017166
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

For several applications, micro cells with a uniform temperature profile and at least one optical port are required. One example for those cells is the physics package of a chip-scale-atomic-clock. It is necessary that the micro chambers are heated homogeneously to 353 K using a low energy consumption heater. In this work transparent heating structures are investigated to achieve this goal. First an analytical approach is used to describe the behavior of thermal energy dissipation of the heating structures. Then different approaches of possible heater structures are simulated to find the optimal basic configuration. Furthermore, this configuration is optimized to obtain a uniform temperature distribution in the whole cell.

Citation Download Citation

Henning Völlm, Jonathan Herrmann, Reinhard Maier, Dara Feili, Volker Häublein, Heiner Ryssel, and Helmut Seidel "Simulation and design optimization of transparent heaters for spectroscopic micro cells", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632C (17 May 2013); https://doi.org/10.1117/12.2017166

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available