Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

Timo Lipka; Julia Amthor; Hoc Khiem Trieu; Jörg Müller

doi:10.1117/12.2018509

22 May 2013 Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

Timo Lipka, Julia Amthor, Hoc Khiem Trieu, Jörg Müller

Proceedings Volume 8767, Integrated Photonics: Materials, Devices, and Applications II; 876707 (2013) https://doi.org/10.1117/12.2018509
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOS-compatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20 dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented.

Citation Download Citation

Timo Lipka, Julia Amthor, Hoc Khiem Trieu, and Jörg Müller "Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon", Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 876707 (22 May 2013); https://doi.org/10.1117/12.2018509

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