Pixel length calibration using a pattern matching method for secondary-electron images

Kentaro Sugawara; Ichiko Misumi; Satoshi Gonda

doi:10.1117/12.2021086

22 June 2013 Pixel length calibration using a pattern matching method for secondary-electron images

Kentaro Sugawara, Ichiko Misumi, Satoshi Gonda

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876909 (2013) https://doi.org/10.1117/12.2021086
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

We developed a calibration method using a pattern matching method for the SEM equipped with laser interferometer units at an X-Y sample stage. By comparing two images captured before and after the stage movement, an each of moving pixel number to X and Y direction were analyzed using the image processing technique. Then the pixel length was calibrated using stage position data and the pixel data. The developed calibration methods were applied to nano-particle measurements. The sample particle sizes were nominal diameter of 100 nm and 300 nm. Measurement uncertainty evaluation was done and quantitatively reliable results were obtained.

Citation Download Citation

Kentaro Sugawara, Ichiko Misumi, and Satoshi Gonda "Pixel length calibration using a pattern matching method for secondary-electron images", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876909 (22 June 2013); https://doi.org/10.1117/12.2021086

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