Full-field transmission-type angle deviation microscopes

Ming-Hung Chiu; Ming-Hung Tsai

doi:10.1117/12.2022954

6 September 2013 Full-field transmission-type angle deviation microscopes

Ming-Hung Chiu, Ming-Hung Tsai

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 88390O (2013) https://doi.org/10.1117/12.2022954
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We proposed a three-dimensional (3-D) microscope with a magnification of 50X based on the principle of angle deviation microscopy for measuring the transparent materials. We utilized a parallel beam like uncountable probes to sense a specimen. After sensing, each light may be deflected a small angle due to the non-smooth surface or/and the change of refractive index. A parallelogram prism is used to acquiring all the deflective angles by measuring the reflectivity of prism based on the critical angle method. Thus, the surface height is proportional to the deflective angle and the reflectivity. Using two CCDs is to record the intensity patterns on conditions of TIR and the critical angle, respectively. The CCDs are located at the image planes, one is in the TIR path, and the other is in the critical angle path, respectively. Thus, the reflectivity pattern can be calculated and transformed into the 3-D surface profile. In our experiment, the lateral and vertical resolutions can be demonstrated within submicron and 1 nm, respectively.

Citation Download Citation

Ming-Hung Chiu and Ming-Hung Tsai "Full-field transmission-type angle deviation microscopes", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390O (6 September 2013); https://doi.org/10.1117/12.2022954

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