Simulation and signal analysis of Akiyama probe applied to atomic force microscope

Longlong Wang; Mingzhen Lu; Tong Guo; Sitian Gao; Huakun Zhang

doi:10.1117/12.2035726

10 October 2013 Simulation and signal analysis of Akiyama probe applied to atomic force microscope

Longlong Wang, Mingzhen Lu, Tong Guo, Sitian Gao, Huakun Zhang

Author Affiliations +

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89160W (2013) https://doi.org/10.1117/12.2035726
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

Atomic force microscope is one of indispensable measurement tools in nano/micronano precision manufacture and critical dimension measurement. To expand its industry application, a novel head and system are newly designed combined with Nanosensors cooperation’s patented probe — Akiyama probe, which is a self-sensing probe. The modal analysis and resonance frequency are obtained by finite element(FE) simulations. Using the Locked-in amplifier, the effective and available signal can be abtained. Through the experiment analysis, the retracting and extending curve reflects the tip and sample interaction. Furthermore, the measurement on the calibrated position system demonstrates that the whole system resolution can reach the nanometer scale.

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Longlong Wang, Mingzhen Lu, Tong Guo, Sitian Gao, and Huakun Zhang "Simulation and signal analysis of Akiyama probe applied to atomic force microscope", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160W (10 October 2013); https://doi.org/10.1117/12.2035726

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