Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach

Julien Zelgowski; Frédéric Mermet; Frédéric Antoni; Cyril Mauclair; Eric Fogarassy; Eric Mottay

doi:10.1117/12.2037736

6 March 2014 Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach

Julien Zelgowski, Frédéric Mermet, Frédéric Antoni, Cyril Mauclair, Eric Fogarassy, Eric Mottay

Author Affiliations +

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670U (2014) https://doi.org/10.1117/12.2037736
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

An increase of industrial needs for micro-ablation and surface structuration using sub-picosecond laser working at high repetition rate is required. In this context, new industrial lasers were recently commercialized for such a type of purpose. The potential of a new industrial femtosecond laser source (Tangerine model from Amplitude Système) is investigated in this work for different etching purposes. Our experimental results will be also compared to those obtained when using Ti:Sa laser source, with the help of numerical simulations.

Citation Download Citation

Julien Zelgowski, Frédéric Mermet, Frédéric Antoni, Cyril Mauclair, Eric Fogarassy, and Eric Mottay "Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670U (6 March 2014); https://doi.org/10.1117/12.2037736

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