Manufacturing technique of large-area optical elements with micro/nano structures on both surfaces

Toshimitsu Takaoka; Hidetoshi Fukui; Tomoya Yamashita; Takeshi Matsuo; Kazuya Yamamoto; Hiroshi Owari; Hiroshi Ito

doi:10.1117/12.2038745

7 March 2014 Manufacturing technique of large-area optical elements with micro/nano structures on both surfaces

Toshimitsu Takaoka, Hidetoshi Fukui, Tomoya Yamashita, Takeshi Matsuo, Kazuya Yamamoto, Hiroshi Owari, Hiroshi Ito

Proceedings Volume 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII; 897418 (2014) https://doi.org/10.1117/12.2038745
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Melt transcription molding is one of novel processes suitable for manufacturing large-area thin film with microstructures. We designed the mold which enables to transfer structures on both surfaces for the melt transcription molding machine and examined about relations of temperature and pressure on the accuracy of dimension and optical strain. To keep the high accuracy of relative position between both surfaces, the mold can avoid strain caused by the thermal expansion of metal and is optimized by three-dimension unsteady heat conduction analysis. As a result, distribution of pressure mainly affects stress and distribution density, influences shrinkage and accuracy of position. The decenter between both surfaces was several micrometers. This makes it possible to mass-produce the large-area optical elements which is formed the micro and nano structures on both surfaces with extremely low birefringence at high productivity.

Citation Download Citation

Toshimitsu Takaoka, Hidetoshi Fukui, Tomoya Yamashita, Takeshi Matsuo, Kazuya Yamamoto, Hiroshi Owari, and Hiroshi Ito "Manufacturing technique of large-area optical elements with micro/nano structures on both surfaces", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 897418 (7 March 2014); https://doi.org/10.1117/12.2038745

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available