Efficient grating simulation for general incident beam

Site Zhang; Frank Wyrowski; Jani Tervo

doi:10.1117/12.2039961

7 March 2014 Efficient grating simulation for general incident beam

Site Zhang, Frank Wyrowski, Jani Tervo

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 897710 (2014) https://doi.org/10.1117/12.2039961
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Fourier modal method (FMM) is known as a powerful tool in simulations of periodic micro-structures, e.g., gratings. For an arbitrary plane wave incidence, the Rayleigh coefficients for both reflected and transmitted field can be calculated with the FMM efficiently. When dealing with a general beam incidence, FMM together with plane wave decomposition can still provide solutions. However the needed computational resources increase with the number of plane wave components in the angular spectrum domain. To solve this problem, we put forward an efficient approach which integrates interpolation technique into the method above. For most diffractive thin elements, the complex Rayleigh coefficients distribution is smooth. In this case several well-selected plane wave components are enough to characterize the diffraction property. In our method, only these selected plane wave components are analyzed with FMM while the results of other components are obtained by interpolation technique. Besides that, an efficient approach for especially divergent incident beam is also presented in this article. It enable a parallel FMM analysis which calculates a set of plane wave components in one computational loop.

Citation Download Citation

Site Zhang, Frank Wyrowski, and Jani Tervo "Efficient grating simulation for general incident beam", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897710 (7 March 2014); https://doi.org/10.1117/12.2039961

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available