Micro-optics in advanced optical metrology

Michał Józwik

doi:10.1117/12.2037501

31 December 2013 Micro-optics in advanced optical metrology

Michał Józwik

Proceedings Volume 9042, 2013 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 904202 (2013) https://doi.org/10.1117/12.2037501
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

An accurate characterization is a very important topic in a wide range of MEMS/MOEMS applications and crucial for their fabrication process. Standard characterization is performed with bulk measurement system. Usually, a high resolution optical systems measure one structure at a time and scan the measurement samples from structure to structure. These systems are not well suited to the production control of microsystems, where several thousands of structures are fabricated on the same substrate simultaneously. The paper presents new approaches using microoptics and micromachining to overcome the large ratio of wafer size to feature size in the testing step of production. The refractive and diffractive microoptical components, often fabricated on glass wafer, allow to create arrays of integrated measurement instruments. This work focuses on a new full-field optical concept for parallel, high volume M(O)EMSs' testing. The use of diffraction gratings for the realization of an array of integrated interferometers allows to create compact device with 25 measurement channels. The design of measurement platform and interferometer array, its assembly and the validation measurement results, are discussed in details. The functionality of system includes static and dynamic in-line characterization of MEMS.

Citation Download Citation

Michał Józwik "Micro-optics in advanced optical metrology", Proc. SPIE 9042, 2013 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 904202 (31 December 2013); https://doi.org/10.1117/12.2037501

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available