Modeling and sensitivity analysis of a MEMS vibratory rotation rate sensor

S. A. M. Lajimi; Eihab Abdel-Rahman; Glenn Heppler

doi:10.1117/12.2045127

8 March 2014 Modeling and sensitivity analysis of a MEMS vibratory rotation rate sensor

S. A. M. Lajimi, Eihab Abdel-Rahman, Glenn Heppler

Proceedings Volume 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014; 90612I (2014) https://doi.org/10.1117/12.2045127
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

A cantilever beam-rigid body microgyroscope under electrostatic force is introduced and analytically modeled. The linear dynamics of the microsystem are studied in detail and the main parameters of the sensor are investigated. The square beam carries an eccentric end rigid body affecting the dynamic and static characteristics of the sensor. A detailed sensitivity analysis is performed and the effects of the base rotation rate, the excitation frequency, and the damping ratio (quality factor) on the dynamics of the system are explored.

Citation Download Citation

S. A. M. Lajimi, Eihab Abdel-Rahman, and Glenn Heppler "Modeling and sensitivity analysis of a MEMS vibratory rotation rate sensor", Proc. SPIE 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014, 90612I (8 March 2014); https://doi.org/10.1117/12.2045127

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