Study on the stitching interferometry for the surface profile measurement of a large aperture component

Weirui Zhao; Lirong Qiu; Weiqian Zhao; Genrui Cao

doi:10.1117/12.2053182

28 May 2014 Study on the stitching interferometry for the surface profile measurement of a large aperture component

Weirui Zhao, Lirong Qiu, Weiqian Zhao, Genrui Cao

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100W (2014) https://doi.org/10.1117/12.2053182
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

The stitching interferometry for the surface profile measurement of a large aperture component is studied. To analyze the overlapping region interferogram of the adjacent subapertures with Scale Invariant Feature Transform(SIFT) algorithm, the stitching parameters of the adjacent subapertures and then overall surface information of the tested component can be obtained. SIFT algorithm of subaperture positioning, interferogram processing, phase unwrapping, Zernike polynomials wavefront fitting and subaperture wavefront stitching programs are written. A principle experiment has been carried out. Compared with the measurement results between the stitching interferometry and full caliber testing, the deviation of RMS is less than 2nm.

Citation Download Citation

Weirui Zhao, Lirong Qiu, Weiqian Zhao, and Genrui Cao "Study on the stitching interferometry for the surface profile measurement of a large aperture component", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100W (28 May 2014); https://doi.org/10.1117/12.2053182

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