High temperature SiC pressure sensors with low offset voltage shift

Robert S. Okojie; Dorothy Lukco; Vu Nguyen; Ender Savrun

doi:10.1117/12.2050812

5 June 2014 High temperature SiC pressure sensors with low offset voltage shift

Robert S. Okojie, Dorothy Lukco, Vu Nguyen, Ender Savrun

Proceedings Volume 9113, Sensors for Extreme Harsh Environments; 911308 (2014) https://doi.org/10.1117/12.2050812
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

Very low (~0.125 mV) shifts in offset voltage were achieved in silicon carbide (SiC) piezoresistive pressure sensors during thermal cycling between 25 and 500 °C for 500 hours. It resulted in reduced measurement error to ~ 0.36 % and ~ 0.9 % of the full-scale output at 25 and 500 °C, respectively. The reduction in the offset shift was the result of the advancement made in controlling the intermetallic diffusion and microstructural phase changes within the contact metallization. The low offset voltage results provide critical figures of merit needed for quantifying the measurement error and correction when the SiC pressure sensors are used. The results demonstrate more robust and reliable SiC pressure sensors operating with significantly reduced FSO errors at 500 °C.

Citation Download Citation

Robert S. Okojie, Dorothy Lukco, Vu Nguyen, and Ender Savrun "High temperature SiC pressure sensors with low offset voltage shift", Proc. SPIE 9113, Sensors for Extreme Harsh Environments, 911308 (5 June 2014); https://doi.org/10.1117/12.2050812

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available