Self-assembled transparent a-IGZO based TFTs for flexible sensing applications

Yuanjie Li; Yanghui Liu; Feng Yun; Yaodong Yang; Qing Wan

doi:10.1117/12.2068533

21 August 2014 Self-assembled transparent a-IGZO based TFTs for flexible sensing applications

Yuanjie Li, Yanghui Liu, Feng Yun, Yaodong Yang, Qing Wan

Proceedings Volume 9233, International Symposium on Photonics and Optoelectronics 2014; 92332A (2014) https://doi.org/10.1117/12.2068533
Event: International Symposium on Photonics and Optoelectronics (SOPO 2014), 2014, Suzhou, China

Abstract

In this work, transparent amorphous InGaZnO (a-IGZO) thin films have been deposited on quartz glass substrates using RF magnetron sputtering at room temperature at the O₂ flow rate from 0 to 4 sccm. Electrical transport properties and optical transmittance of the a-IGZO films strongly depend on O₂/Ar flow rate ratio. Electrical conductivity of the a- IGZO films dramatically decreases from semiconducting to semi-insulating with increasing the O₂ flow rate above 1 sccm. Optical transmittance of the a-IGZO films, however, has been improved up to 85% by increasing O₂ flow rate. Amorphous IGZO-based thin film transistors have been developed on indium-tin-oxide glass substrates with the phosphorus doped nanogranular SiO₂ film of ~800 nm deposited by plasma-enhanced chemical vapor deposition at room temperature as the gate dielectric layer. The accumulation of protons at the IGZO/SiO₂ interface induces a large electricdouble- layer capacitance. Enhancement-mode IGZO/SiO₂/ITO TFT devices with field effect mobility of 10.5 cm²/Vs and low threshold voltage of 0.7 V have been achieved. Furthermore, a-IGZO TFT devices exhibit subthreshold swing of 70 mV/dec and I_on/off of 1.5x10⁶. Optical transmission spectra show that the a-IGZO thin film transistors arrays on glass substrates is highly transparent with optical transmittance above 80%.

Citation Download Citation

Yuanjie Li, Yanghui Liu, Feng Yun, Yaodong Yang, and Qing Wan "Self-assembled transparent a-IGZO based TFTs for flexible sensing applications", Proc. SPIE 9233, International Symposium on Photonics and Optoelectronics 2014, 92332A (21 August 2014); https://doi.org/10.1117/12.2068533

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available