High throughput data acquisition with a multi-beam SEM

Anna Lena Keller; Dirk Zeidler; Thomas Kemen

doi:10.1117/12.2069119

16 September 2014 High throughput data acquisition with a multi-beam SEM

Anna Lena Keller, Dirk Zeidler, Thomas Kemen

Proceedings Volume 9236, Scanning Microscopies 2014; 92360B (2014) https://doi.org/10.1117/12.2069119
Event: SPIE Scanning Microscopies, 2014, Monterey, California, United States

Abstract

Conventional scanning electron microscopes are limited in their ultimate data acquisition rate at a given resolution by statistical electron-electron interaction (so-called Coulomb interaction) as well as band width of detectors and deflection systems. We increased imaging speed dramatically by using multiple electron beams in a single column and parallel detection of the secondary electrons. The multi-beam SEM generates multiple overlapping images during a single scan pass, thereby covering a larger area in shorter time as compared to a single-beam SEM at the same pixel size. This addresses the upcoming need for high speed imaging at electron microscopic resolution to investigate larger and larger areas and volumes.

Citation Download Citation

Anna Lena Keller, Dirk Zeidler, and Thomas Kemen "High throughput data acquisition with a multi-beam SEM", Proc. SPIE 9236, Scanning Microscopies 2014, 92360B (16 September 2014); https://doi.org/10.1117/12.2069119

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