Screening EUV mask absorbers for defect repair

Takeshi Isogawa; Kazunori Seki; Mark Lawliss; Emily Gallagher; Shinji Akima; Toshio Konishi

doi:10.1117/12.2070251

28 July 2014 Screening EUV mask absorbers for defect repair

Takeshi Isogawa, Kazunori Seki, Mark Lawliss, Emily Gallagher, Shinji Akima, Toshio Konishi

Proceedings Volume 9256, Photomask and Next-Generation Lithography Mask Technology XXI; 92560N (2014) https://doi.org/10.1117/12.2070251
Event: Photomask Japan 2014, 2014, Yokohama, Japan

Abstract

Five EUV film stacks were prepared and evaluated from the multiple viewpoints of mask repair process: etching property, CD control and wafer print. Etching property results revealed a thicker lower reflective (LR) layer stack showed good performance. Some types of defects were repaired and a CD comparison done with both CD-SEM and EUV microscope. It was found thinner total film stack (LR plus absorber) performs better than thicker ones for CD control. In addition, thicker LR performed better than thinner LR. Wafer print performance on the repaired site was evaluated through focus by imaging on an EUV microscope. Wafer printability performance showed that thinner total film stack performed better than a thicker one. Finally the best stack for EUV mask repair performance was determined to be a thinner total film stack and thicker a LR from all the various points of view.

Citation Download Citation

Takeshi Isogawa, Kazunori Seki, Mark Lawliss, Emily Gallagher, Shinji Akima, and Toshio Konishi "Screening EUV mask absorbers for defect repair", Proc. SPIE 9256, Photomask and Next-Generation Lithography Mask Technology XXI, 92560N (28 July 2014); https://doi.org/10.1117/12.2070251

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available