Dual-frequency laser displacement and angle interferometer

Shijie Zhao; Haoyun Wei; Yan Li

doi:10.1117/12.2071869

13 November 2014 Dual-frequency laser displacement and angle interferometer

Shijie Zhao, Haoyun Wei, Yan Li

Proceedings Volume 9276, Optical Metrology and Inspection for Industrial Applications III; 92761T (2014) https://doi.org/10.1117/12.2071869
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Traditional laser angular interferometers based on a Michelson Interferometer or its modifications have the same principle: changing the angle displacement to an optical path difference. However, measuring the angular error of stage travels is a dynamic process. The main trouble is lack of displacement information and need to be solved urgently. A obvious method is using two dual-frequency interferometers to get the displacement and angular. In this paper, a new kind of displacement and angle interferometer (DIAI) is introduced. In this DIAI, displacement and angular are measured simultaneously by special optical path. The DIAI consists of a stabilized orthogonal polarization dualfrequency laser, a monolithic prism and additional optical and electronic components. The dual-frequency laser is divided into reference light and measurement light by a beam-splitting prism. The measurement light spatially separated into horizontal polarized light and vertical polarized light by the polarization splitting prism. Changing by a fixed 45°- tilted reflector, the vertical polarized light is parallel to the horizontal polarized light. These parallel lights reflected by two corner cube retroreflectors at a moving target. Compared with the reference light, the displacement and angular are measured. Different from the traditional method, there is only one reference corner cube retroreflector in this system. Thus, the angular measurement accuracy is better. The accuracy of the DIAI is better than ±0.25 arcsec in comparison with an autocollimator.

Citation Download Citation

Shijie Zhao, Haoyun Wei, and Yan Li "Dual-frequency laser displacement and angle interferometer", Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 92761T (13 November 2014); https://doi.org/10.1117/12.2071869

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