Substrate-blind photonic integration based on high-index glass materials

Hongtao Lin; Lan Li; Yi Zou; Qingyang Du; Okechukwu Ogbuu; Charmayne Smith; Erick Koontz; David Musgraves; Kathleen Richardson; Juejun Hu

doi:10.1117/12.2073972

13 November 2014 Substrate-blind photonic integration based on high-index glass materials

Hongtao Lin, Lan Li, Yi Zou, Qingyang Du, Okechukwu Ogbuu, Charmayne Smith, Erick Koontz, David Musgraves, Kathleen Richardson, Juejun Hu

Author Affiliations +

Proceedings Volume 9277, Nanophotonics and Micro/Nano Optics II; 92770T (2014) https://doi.org/10.1117/12.2073972
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures (< 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.

Citation Download Citation

Hongtao Lin, Lan Li, Yi Zou, Qingyang Du, Okechukwu Ogbuu, Charmayne Smith, Erick Koontz, David Musgraves, Kathleen Richardson, and Juejun Hu "Substrate-blind photonic integration based on high-index glass materials", Proc. SPIE 9277, Nanophotonics and Micro/Nano Optics II, 92770T (13 November 2014); https://doi.org/10.1117/12.2073972

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