Study on optical polishing experiment of zerodur mirror

Huijun Wang; Hang Li; Peng Wang; Wen Guo; Yonggang Wang; Yan Du; Huiwen Dong

doi:10.1117/12.2068813

6 August 2014 Study on optical polishing experiment of zerodur mirror

Huijun Wang, Hang Li, Peng Wang, Wen Guo, Yonggang Wang, Yan Du, Huiwen Dong

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810D (2014) https://doi.org/10.1117/12.2068813
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

A zerodur mirror whose aperture is 900mm is chosen to be the primary mirror of an optical system. The mirror is polished by rapid polishing and precision polishing methods relatively. The final surface figures of the mirror are as follows: the peak-to-valley value (P-V value) is 0.204λ (λ=632.8nm), and the root-mean-square value (RMS value) is 0.016λ, which meet the requirement of the optical system. The results show that the polishing process is feasible.

Citation Download Citation

Huijun Wang, Hang Li, Peng Wang, Wen Guo, Yonggang Wang, Yan Du, and Huiwen Dong "Study on optical polishing experiment of zerodur mirror", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810D (6 August 2014); https://doi.org/10.1117/12.2068813

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available