A sampling method to measure surface roughness of circular flat

Kai Meng; Yongjian Wan; Fan Wu; Lijun Shen; Weihong Song

doi:10.1117/12.2073329

18 September 2014 A sampling method to measure surface roughness of circular flat

Kai Meng, Yongjian Wan, Fan Wu, Lijun Shen, Weihong Song

Author Affiliations +

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92820J (2014) https://doi.org/10.1117/12.2073329
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat.

Citation Download Citation

Kai Meng, Yongjian Wan, Fan Wu, Lijun Shen, and Weihong Song "A sampling method to measure surface roughness of circular flat", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820J (18 September 2014); https://doi.org/10.1117/12.2073329

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