Paper
18 September 2014 A method which can enhance the optical-centering accuracy
Xue-min Zhang, Xue-jun Zhang, Yi-dan Dai, Tao Yu, Jia-you Duan, Hua Li
Author Affiliations +
Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92821G (2014) https://doi.org/10.1117/12.2069793
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
Optical alignment machining is an effective method to ensure the co-axiality of optical system. The co-axiality accuracy is determined by optical-centering accuracy of single optical unit, which is determined by the rotating accuracy of lathe and the optical-centering judgment accuracy. When the rotating accuracy of 0.2um can be achieved, the leading error can be ignored. An axis-determination tool which is based on the principle of auto-collimation can be used to determine the only position of centerscope is designed. The only position is the position where the optical axis of centerscope is coincided with the rotating axis of the lathe. Also a new optical-centering judgment method is presented. A system which includes the axis-determination tool and the new optical-centering judgment method can enhance the optical-centering accuracy to 0.003mm.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xue-min Zhang, Xue-jun Zhang, Yi-dan Dai, Tao Yu, Jia-you Duan, and Hua Li "A method which can enhance the optical-centering accuracy", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92821G (18 September 2014); https://doi.org/10.1117/12.2069793
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KEYWORDS
Optical alignment

Optical spheres

Oxygen

Singular optics

Calibration

Optics manufacturing

Photomasks

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