Femtosecond laser direct writing of high-Q microresonators in glass and crystals

Jintian Lin; Yingxin Xu; Jiangxin Song; Jialei Tang; Zhiwei Fang; Min Wang; Wei Fang; Ya Cheng

doi:10.1117/12.2071737

3 March 2015 Femtosecond laser direct writing of high-Q microresonators in glass and crystals

Jintian Lin, Yingxin Xu, Jiangxin Song, Jialei Tang, Zhiwei Fang, Min Wang, Wei Fang, Ya Cheng

Proceedings Volume 9343, Laser Resonators, Microresonators, and Beam Control XVII; 934310 (2015) https://doi.org/10.1117/12.2071737
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd: glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 μm diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.

Citation Download Citation

Jintian Lin, Yingxin Xu, Jiangxin Song, Jialei Tang, Zhiwei Fang, Min Wang, Wei Fang, and Ya Cheng "Femtosecond laser direct writing of high-Q microresonators in glass and crystals", Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 934310 (3 March 2015); https://doi.org/10.1117/12.2071737

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