Standard cell design in N7: EUV vs. immersion

Bharani Chava; David Rio; Yasser Sherazi; Darko Trivkovic; Werner Gillijns; Peter Debacker; Praveen Raghavan; Ahmad Elsaid; Mircea Dusa; Abdelkarim Mercha; Julien Ryckaert; Diederik Verkest

doi:10.1117/12.2085739

18 March 2015 Standard cell design in N7: EUV vs. immersion

Bharani Chava, David Rio, Yasser Sherazi, Darko Trivkovic, Werner Gillijns, Peter Debacker, Praveen Raghavan, Ahmad Elsaid, Mircea Dusa, Abdelkarim Mercha, Julien Ryckaert, Diederik Verkest

Author Affiliations +

Proceedings Volume 9427, Design-Process-Technology Co-optimization for Manufacturability IX; 94270E (2015) https://doi.org/10.1117/12.2085739
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

While waiting for EUV lithography to become ready for adoption, we need to create designs compatible with both EUV single exposures as well as with 193i multiple splits strategy for technology nodes 7nm and below needed to keep the scaling trend intact. However, the standard approach of designing standard cells in two-dimensional directions is no more valid owing to insufficient resolution of 193-i scanner. Therefore, we propose a standard cell design methodology, which exploits purely one-dimensional interconnect.

Citation Download Citation

Bharani Chava, David Rio, Yasser Sherazi, Darko Trivkovic, Werner Gillijns, Peter Debacker, Praveen Raghavan, Ahmad Elsaid, Mircea Dusa, Abdelkarim Mercha, Julien Ryckaert, and Diederik Verkest "Standard cell design in N7: EUV vs. immersion", Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 94270E (18 March 2015); https://doi.org/10.1117/12.2085739

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available