Reversible and non-reversible changes in nanostructured Si in humid atmosphere

V. Zhigalov; O. Pyatilova; S. Timoshenkov; S. Gavrilov

doi:10.1117/12.2180958

18 December 2014 Reversible and non-reversible changes in nanostructured Si in humid atmosphere

V. Zhigalov, O. Pyatilova, S. Timoshenkov, S. Gavrilov

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400B (2014) https://doi.org/10.1117/12.2180958
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

Atmosphere water influence in the nanostructured silicon (NSS) was investigated by IR-spectroscopy and electron work function measurement. Long-term non-reversible dynamics of IR-spectra was found as a result of 100% humidity influence on the nanostructured silicon. It was indicated that air humidity affects on the work function. Dynamics of the electron work function consists of reversible and non-reversible components. Reversible component appears as strong anti-correlation between work function and humidity. Work function change of NSS is about 0.4 eV while the humidity changes between 0% and 100%. Reversible component can be explained by physical sorption of water molecules on the surface. Non-reversible component manifests as long-term decreasing trend of work function in humid atmosphere. Transition curve during abruptly humidity changes alters its shape. Non-reversible component can be explained by chemisorption of water.

Citation Download Citation

V. Zhigalov, O. Pyatilova, S. Timoshenkov, and S. Gavrilov "Reversible and non-reversible changes in nanostructured Si in humid atmosphere", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400B (18 December 2014); https://doi.org/10.1117/12.2180958

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