A voice coil motor based measuring force control system for tactile scanning profiler

Shengdong Feng; Xiaojun Liu; Liangzhou Chen; Liping Zhou; Wenlong Lu

doi:10.1117/12.2181350

6 March 2015 A voice coil motor based measuring force control system for tactile scanning profiler

Shengdong Feng, Xiaojun Liu, Liangzhou Chen, Liping Zhou, Wenlong Lu

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463B (2015) https://doi.org/10.1117/12.2181350
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

In tactile scanning profiler, the measuring force would change in a wide range when it was used for profile measurement in a large range, which could possibly destroy the measured surface. To solve the problem, measuring force control system for tactile scanning profiler was needed. In the paper, a voice coil motor-based measuring force control system for tactile scanning profiler was designed. In the design, a low stiffness coefficient spring was used to provide contact force, while a voice coil motor (VCM) to balance the spring force so that the contact force could be kept for constant measuring force. A VCM was designed specially, and for active measuring force control, a precision current source circuit under the control of a DSP unit was designed to drive the VCM. The performance of voice coil motor based measuring force control system had been tested, and its good characteristics were verified.

Citation Download Citation

Shengdong Feng, Xiaojun Liu, Liangzhou Chen, Liping Zhou, and Wenlong Lu "A voice coil motor based measuring force control system for tactile scanning profiler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463B (6 March 2015); https://doi.org/10.1117/12.2181350

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