Measuring accuracy of in-plane and out-of-plane deformation simultaneous measurement of speckle interferometry using multi-recording method

Y. Arai

doi:10.1117/12.2181198

14 May 2015 Measuring accuracy of in-plane and out-of-plane deformation simultaneous measurement of speckle interferometry using multi-recording method

Y. Arai

Author Affiliations +

Proceedings Volume 9489, Dimensional Optical Metrology and Inspection for Practical Applications IV; 94890F (2015) https://doi.org/10.1117/12.2181198
Event: SPIE Sensing Technology + Applications, 2015, Baltimore, MD, United States

Abstract

A novel in-plane and out-of-plane deformation simultaneous measurement method using only two speckle patterns grabbed before and after deformation of an object with rough surfaces has been proposed. In the new optical system, a phenomenon of in-plane and out-of-plane deformation can be simultaneously recorded by only one camera by using the multi-recording method of speckle patterns. However, it is thought that there are some problems concerning measuring accuracy, because plural dimensional data has to be grabbed by single camera. The influence of factor of each error source to measuring accuracy of the method is investigated by using experimental results.

Citation Download Citation

Y. Arai "Measuring accuracy of in-plane and out-of-plane deformation simultaneous measurement of speckle interferometry using multi-recording method", Proc. SPIE 9489, Dimensional Optical Metrology and Inspection for Practical Applications IV, 94890F (14 May 2015); https://doi.org/10.1117/12.2181198

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available