Phase-Measuring Interferometry: Applications And Techniques

Jay A. Tome; H.Philip Stahl

doi:10.1117/12.947575

16 January 1989 Phase-Measuring Interferometry: Applications And Techniques

Jay A. Tome, H.Philip Stahl

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947575
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

A review of the current state of phase-measuring interferometry is presented. Emphasis is placed on the broadening field of applications for the technique including; micro-surface topology, non-destructive testing, and surface contouring. Advance techniques of extending the range of phase-measuring interferometry and high speed data sampling are presented, along with two other techniques of interest.

Citation Download Citation

Jay A. Tome and H.Philip Stahl "Phase-Measuring Interferometry: Applications And Techniques", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947575

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available