Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments

Allyn Jackson

doi:10.1117/12.2209736

4 September 2015 Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments

Allyn Jackson

Author Affiliations +

Proceedings Volume 9661, 31st European Mask and Lithography Conference; 96610Y (2015) https://doi.org/10.1117/12.2209736
Event: 31st European Mask and Lithography Conference, 2015, Eindhoven, Netherlands

Abstract

There are significant advantages of using the ReticleSense™ Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.

Citation Download Citation

Allyn Jackson "Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments", Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610Y (4 September 2015); https://doi.org/10.1117/12.2209736

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