A resonant circuit realization using a 3D inductor in combination with thin film varactor technology

Shu Wang; Eunsung Shin; Guru Subramanyam; Weisong Wang; Kevin Leedy; Tony Quach; Charles Cerny

doi:10.1117/12.2220421

6 November 2015 A resonant circuit realization using a 3D inductor in combination with thin film varactor technology

Shu Wang, Eunsung Shin, Guru Subramanyam, Weisong Wang, Kevin Leedy, Tony Quach, Charles Cerny

Proceedings Volume 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors; 966705 (2015) https://doi.org/10.1117/12.2220421
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2015, Suzhou, China

Abstract

A resonant circuit combining a 3D inductor with the barium strontium titanate thin film varactor, is presented in this work. The filter was fabricated using a 3D inductor fabrication process. The modeling of the filter was examined using the Advanced Design System (ADS). The measurement results showed that the resonant frequencies were around 10 GHz and correlated to different number of turns of 3D inductor. The inductances extracted from the equivalent circuit varied from 0.28 nH to 0.37 nH.

Citation Download Citation

Shu Wang, Eunsung Shin, Guru Subramanyam, Weisong Wang, Kevin Leedy, Tony Quach, and Charles Cerny "A resonant circuit realization using a 3D inductor in combination with thin film varactor technology", Proc. SPIE 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors, 966705 (6 November 2015); https://doi.org/10.1117/12.2220421

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