Tensile strained Ge0.90Sn0.10 photodiode integrated with Si3N4 liner stressor for mid-infrared applications

Qingfang Zhang; Yan Liu; Chunfu Zhang; Yue Hao; Genquan Han

doi:10.1117/12.2199377

15 October 2015 Tensile strained Ge_0.90Sn_0.10 photodiode integrated with Si₃N₄ liner stressor for mid-infrared applications

Qingfang Zhang, Yan Liu, Chunfu Zhang, Yue Hao, Genquan Han

Author Affiliations +

Proceedings Volume 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology; 96741B (2015) https://doi.org/10.1117/12.2199377
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

In this paper, tensile strained Ge_0.90Sn_0.10 photodiode with different architectures integrated with Si₃N₄ liner stressor for mid-infrared applications are theoretically investigated. Ge_0.90Sn_0.10 fin and waveguide photodiodes wrapped in the Si₃N₄ liner stressor are designed and the strain distribution is studied by the finite element simulation. A large tensile strain is induced in Ge_0.90Sn_0.10 with the Si₃N₄ liner stressor expanding. The energy band structure of tensile strained Ge_0.90Sn_0.10 is calculated using k⋅p theory. The direct bandgap Eg,Γ of Ge_0.90Sn_0.10 under tensile strain is significantly reduced, which results in a large red shift of the cut-off wavelength of strained Ge_0.90Sn_0.10 devices. As the Si₃N₄ liner stressor expands by 1.5%, 25.1% and 48.7% reduction of Eg,Γ are achieved in tensile strained Ge_0.90Sn_0.10 fin and waveguide photodiodes, respectively, compared to the unstrained device. The cut-off wavelengths of tensile strained Ge_0.90Sn_0.10 fin and waveguide devices are extended to 3.68 μm and 5.37 μm, respectively. Introducing tensile strain into GeSn by tensile strain liner stressor provides an effective method for extending the detection spectrum of GeSn photodiodes to mid-infrared wavelength, e.g. 5μm.

Citation Download Citation

Qingfang Zhang, Yan Liu, Chunfu Zhang, Yue Hao, and Genquan Han "Tensile strained Ge_0.90Sn_0.10 photodiode integrated with Si₃N₄ liner stressor for mid-infrared applications", Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96741B (15 October 2015); https://doi.org/10.1117/12.2199377

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