Directed self-assembly of Si-containing and topcoat free block copolymer

Tasuku Matsumiya; Takehiro Seshimo; Tsuyoshi Kurosawa; Hitoshi Yamano; Ken Miyagi; Tomotaka Yamada; Katsumi Ohmori

doi:10.1117/12.2218243

1 April 2016 Directed self-assembly of Si-containing and topcoat free block copolymer

Tasuku Matsumiya, Takehiro Seshimo, Tsuyoshi Kurosawa, Hitoshi Yamano, Ken Miyagi, Tomotaka Yamada, Katsumi Ohmori

Proceedings Volume 9777, Alternative Lithographic Technologies VIII; 97771P (2016) https://doi.org/10.1117/12.2218243
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Directed self-assembly (DSA) of block copolymers (BCPs) with conventional lithography is being thought as one of the potential patterning solution for future generation devices manufacturing. New BCP platform is required to obtain resolution below 10nm half pitch (HP), better roughness, and defect characteristics than PS-b-PMMA. In this study, we will introduce the newly developed Si-containing high chi BCP which can apply perpendicular lamellar orientation with topcoat free, mild thermal annealing under nitrogen process conditions. It will be also shown in experimental results of graphoepitaxy demonstration for L/S multiplication using new high chi BCP.

Citation Download Citation

Tasuku Matsumiya, Takehiro Seshimo, Tsuyoshi Kurosawa, Hitoshi Yamano, Ken Miyagi, Tomotaka Yamada, and Katsumi Ohmori "Directed self-assembly of Si-containing and topcoat free block copolymer", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771P (1 April 2016); https://doi.org/10.1117/12.2218243

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