The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors

B L Evans; J. Al-Dabbagh; B J. Kent

doi:10.1117/12.948776

16 December 1988 The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors

B L Evans, J. Al-Dabbagh, B J. Kent

Author Affiliations +

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948776
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The reflectivities of plane Pt-Si multilayer mirrors of various d-spacings and layer thickness ratios have been measured as a function of angle at wavelengths within the soft X-ray and EUV regions. The measured performance is compared with theory and the effect of heat treating the mirrors interpreted in terms of Pt film agglomeration. The imaging characteristics of a concave Pt-Si multilayer mirror are presented.

Citation Download Citation

B L Evans, J. Al-Dabbagh, and B J. Kent "The Soft X-Ray To Euv Performance Of Plane And Concave Pt-Si Multilayer Mirrors", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948776

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