De-magnifying hyperlens: experimental demonstration and potential applications
(Conference Presentation)

Natalia M. Litchinitser; Jingbo Sun; Tianboyu Xu

doi:10.1117/12.2238373

9 November 2016 De-magnifying hyperlens: experimental demonstration and potential applications (Conference Presentation)

Natalia M. Litchinitser, Jingbo Sun, Tianboyu Xu

Author Affiliations +

Proceedings Volume 9921, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XIV; 99210R (2016) https://doi.org/10.1117/12.2238373
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Hyperlens was already shown to facilitate the sub-diffraction imaging in the far-field by converting the sub-wavelength information carried by evanescent wave components into the propagating waves and magnifying those sub-wavelength details to the scales that can be resolved by conventional optical components. In this talk, we will discuss the case when the hyperlens is used in a reverse way, such that the incident light enters on the outer surface of the hyperlens and collected on the inner surface, the device may function as a de-magnifier. In particular, if a pattern of a large size (above the diffraction limit) is recorded on the outer surface serving as a mask, the sub-wavelength image can be achieved on the inner side of the hyperlens. While this idea was validated using numerical simulations, no experimental demonstration was reported to date. In this talk, we demonstrate de-magnifying hyperlens in laboratory experiments and discuss its potential applications. For example, one of such potential applications is sub-wavelength photolithography. Photolithography is the most widely used fabrication technique in integrated circuit industry. However, further decreasing the feature size becomes challenging, in particular, due to the diffraction limit. We experimentally show de-magnifying property of a spherical hyperlens composed of metal-dielectric multilayer structure with a Cr mask on its outer surface. A photoresist was spin-coated on the inner surface of the hyperlens to record the image. After exposure with 405nm light, the pattern on the mask was recorded in the photoresist on the inner surface of the hyperlens, demonstrating 1.6x de-magnification.

Conference Presentation

Citation Download Citation

Natalia M. Litchinitser, Jingbo Sun, and Tianboyu Xu "De-magnifying hyperlens: experimental demonstration and potential applications (Conference Presentation)", Proc. SPIE 9921, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XIV, 99210R (9 November 2016); https://doi.org/10.1117/12.2238373

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

KEYWORDS

Photomasks

Diffraction

Optical lithography

Photoresist materials

Fabrication

Integrated circuits

Light wave propagation

Show All Keywords

Keywords/Phrases

Search In:

Publication Years